🚀 go-pugleaf

Dates:    31-Mar-2000
Time:     3:30 PM
Cboards:  general
Place:    Hamburg Hall 1000 **NOTE NEW LOCATION for this week only**  
Type:     RI Seminar
Duration: 75 minutes
Who:      Dr. Hiroyuki Fujita
Topic:    MEMS State-Of-The-Art Applications and the Future Direction in
Autonomous Distributed MEMS
Host:     Dr. Takeo Kanade

			ABSTRACT
Research and development in MEMS (microelectromechanical systems)
fabricated by IC-compatible technologies have made remarkable progress
since the first demonstration of micromotors in 1988. MEMS based
products in the market include projection displays and inkjet printers
as well as sensors. Further commercializations are expected in hard
disk drives(HDD), chemical analysis systems, optical communication and
scanning probe microscopes (SPM) for nanometric observation.

This talk deals with MEMS applications in optics, hard disk drives,
and nano technologies. Optical switches and tunable filters are
discussed as typical examples.  Three-dimensional assembly technology
will be presented; this technology was developed for building optical
microsystems that are composed of multiple chips and optical
fibers. In HDD industries, piggy-back servosytems using microactuators
for fine tracking and fast seeking are under intensive development. I
will give some examples of such microactuators and disuss fabrication
challenges. As the third application field, I will talk about
micromachined tools for nano probing and manipulation. Micromachining
technologies have been extended to fabricate nanometric structures
together with microactuators. Micromachined STM (scanning tunneling
microscopes) and nanometric probes have been built in my laboratory
for electrical characterization in 10-100 nm scale and for possible
manipulation of molecules or atoms. Recent results will be presented.

As the second topic, I will discuss autonomous distributed MEMS;
AD-MEMS is composed on arrays of micromodules that contain actuators,
sensors and a controller. The system architecture enable not only
quick and fine control of localized phenomena but also completion of
system level tasks through cooperation of many modules. MEMS
technology is very suitable to realize such systems because of its
integration capability of microactuators, microsensors and
electronics. I will review research activities on the system over the
world as well as our own.

BIO:

Dr.Hiroyuki fujita received the B.S., M.S., and Ph.D. degrees in
electrical engineering from the University of Tokyo in 1975, 1977, and
1980, respectively.  He is now a Professor at the Institute of
Industrial Science, University of Tokyo. His current research
interests include micromachining technology, microactuators, and
micromechatronics.  Dr.Fujita is a Member of the Japanese Society of
Cryogenic Engineering and the president of Sensors and Micromachines
Society of the Japanese Institute of Electrical Engineering.  He is a
President of Sensors and Micromachines Society of IEEJ and an
Associate Editor of IEEE Journal of Microelectromechanical Systems. He
received the M. Hetenyi Award for Experimental Mechanics.

FurtherDetails: Appointments: Susan Pallone (susanp@cs, x8-7967)