🚀 go-pugleaf

Regarding the use of non-US e-beam equipment on US Government sponsored VHSIC
programs.  I was involved in Honeywell's equivalent VHSIC program to develop
0.5 micon devices.  We used JEOL e-beam equipment from the outset of our
program due to the perceived risk of using Perkin-Elmer's AEBLE-150 system
(which was partially developed under VHSIC Phase 3 funding, if I am not
mistaken).  If my memory serves me correctly, the third contractor, IBM, used
an internally developed e-beam machine.  Both Honeywell and TRW/Motorola felt
pressure to use the Perkin-Elmer machine.  (Our customer complained regularily
at the program reviews about the use of the JEOL machine).  The TRW/Motorola
team started using the Perkin-Elmer machine.  I am not completely sure of the
details, since they are second hand, but they received their machine late, and
when it did arrive, it did not meet specs and was not capable of reliably
patterning 0.5 micron feature sizes.  Much of the lateness in TRW's program
can be attributed to the inability to climb the 0.5 micron learning curve when
the equipment was incapable of yeilding test circuits.  I am not sure whether
the AEBLE machine ever met the specs.  They ultimately switched to Japanese
equipment.

The JEOL system was not without it's problems.  They were finicky, with many
hand-tuned components.  Resist problems would cause column contamination which
would result in lengthy cleaning processes.  We regularily reported up-time
percentage and would frequently get months with 0-10% up-time per machine.
However, when they were up, they patterned accurately.

Regarding the sale of Perkin-Elmer's IC equipment division.  As I recall, it
was a case where no US company was interested in purchasing that division.
Japanese firms expressed interest but the US Government is considering
blocking such a sale.  I do not believe a deal has been consumated yet.


Ken Hoyme                    Honeywell Systems and Research Center
(612)782-7354                3660 Technology Dr., Minneapolis, MN 55418
Internet: hoyme@src.honeywell.com