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Article #233

Re: Question regarding probe pads

#233
From: Rajesh K. Gupta
Date: Fri, 04 Sep 1992 17:13
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>   Some points about landing probe pads inside a design chip seems to
be unclear to me.
> Hope some kind soul would be able to help me out.
> 
>   Say I want to probe a point in the circuit, which is a point inside
a standard cell.
> Since standard cells are designed very compact - I have the following
question. Is the
> standard practice is of landing probe pads inside standard cell, or
that of taking a
> metal(?) wire out from the point and placing the probe point at a
convenient point
> outside standard cells. 
> 


typically a picoprobe can be safely manipulated for
distances in ten's of microns (a 20x20 u pad would be
enough).

However, most common practice today is to use voltage-contrast
enhancement techniques on ebeam reflections. A 5x5 pad in topmost 
metal layer would be sufficient. If surrounded by a ground line, it
would be even better. Of course, the tester would cost more.


Rajesh
725-1776 CSL Modulars I				rgupta@sirius.stanford.edu
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References: <tapas.715573218@femto.engr.mun.ca>

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From: rgupta@sirius.Stanford.EDU (Rajesh K. Gupta)
Subject: Re: Question regarding probe pads
Message-ID: <1992Sep4.171306.26970@leland.Stanford.EDU>
Keywords: probe pads
Sender: news@leland.Stanford.EDU (Mr News)
Reply-To: rgupta@sirius.Stanford.EDU (Rajesh K. Gupta)
Organization: Stanford University
References: <tapas.715573218@femto.engr.mun.ca> 
Date: Fri, 4 Sep 92 17:13:06 GMT
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