integrated circut microlithography

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Article #15344

#15344

From: Gary A. Woodward
Date: Mon, 23 Nov 1992 14:44

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I have searched the libraries here in DC and found only information on 
printing lithography.  I need some info on the lith such as that used in 
making IC chips.  Also some info on the chips (silicone) themselves.

thanks in advance.

GW

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Path: arc1-ca.pugleaf.net!sparky!uunet!psinntp!wrldlnk!usenet
From: "Gary A. Woodward" <p00140@psilink.com>
Subject: integrated circut microlithography
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