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Article #16368Microwave Oven Plasma Etcher?
From: edharris
Date: Wed, 06 Jan 1993 04:01
Date: Wed, 06 Jan 1993 04:01
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I'd like to use a small microwave oven ( will a small vacuum chamber inside) to generate reactive plasmas ( O2 etc) for cleaning and etching in our lab. The idea sort of works, but even the smallest ovens (400 Watts or so) generate so much heat that they tend to burn samples more than etch them... Does anyone know how to lower the power output of the magnatron, or is it possible at all? I'd like to cut the power to 50W or so... Thanks, Ed
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Path: arc1-ca.pugleaf.net!sparky!uunet!zaphod.mps.ohio-state.edu!pacific.mps.ohio-state.edu!ohstpy!edharris From: edharris@ohstpy.mps.ohio-state.edu Newsgroups: sci.electronics Subject: Microwave Oven Plasma Etcher? Message-ID: <15340.2b4a1345@ohstpy.mps.ohio-state.edu> Date: 5 Jan 93 23:01:25 EST Organization: The Ohio State University, Department of Physics Lines: 10