Re: Microwave Oven Plasma Etcher?

Article View: sci.electronics

Article #16391

#16391

From: John De Armond
Date: Wed, 06 Jan 1993 09:46

21 lines
1444 bytes

edharris@ohstpy.mps.ohio-state.edu writes:

>I'd like to use a small microwave oven ( will a small vacuum chamber inside) 
>to generate reactive plasmas ( O2 etc) for cleaning and etching in our lab. 
>The idea sort of works, but even the smallest ovens  (400 Watts or so) 
>generate so much heat that they tend to burn samples more than etch them...

>Does anyone know how to lower the power output of the magnatron, or is it
>possible at all? I'd like to cut the power to 50W or so...

Why not just put a container of water in the oven with the chamber and
experiment with the amount of water until you absorb the proper amount
of excess microwave?

John
-- 
John De Armond, WD4OQC               |Interested in high performance mobility?  
Performance Engineering Magazine(TM) | Interested in high tech and computers? 
Marietta, Ga                         | Send ur snail-mail address to 
jgd@dixie.com                        | perform@dixie.com for a free sample mag
Need Usenet public Access in Atlanta?  Write Me for info on Dixie.com.

Technical Details

Message-ID: <!0xr5ph@dixie.com>

Path: arc1-ca.pugleaf.net!sparky!uunet!think.com!rpi!gatech!emory!rsiatl!jgd

References: <15340.2b4a1345@ohstpy.mps.ohio-state.edu>

Show Full Headers

Complete Article Headers

Newsgroups: sci.electronics
Path: arc1-ca.pugleaf.net!sparky!uunet!think.com!rpi!gatech!emory!rsiatl!jgd
From: jgd@dixie.com (John De Armond)
Subject: Re: Microwave Oven Plasma Etcher?
Message-ID: <!0xr5ph@dixie.com>
Date: Wed, 06 Jan 93 09:46:39 GMT
Organization: Dixie Communications Public Access.  The Mouth of the South.
References: <15340.2b4a1345@ohstpy.mps.ohio-state.edu>
Lines: 21

Reply to Parent Message