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Article #16734Re: Microwave Oven Plasma Etcher? (results)
From: Barry x24904/ER/167B-TED
Date: Sat, 09 Jan 1993 00:09
Date: Sat, 09 Jan 1993 00:09
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3507 bytes
In article <15387.2b4d8179@ohstpy.mps.ohio-state.edu> edharris@ohstpy.mps.ohio-state.edu writes: > I put in a beaker of water and tried adjusting the amount of power by >varying the amount of water. > >Unfortunately though, if you put in too much water, it seems to kill the >plasma. If you back off a bit on the amount of water, then the plasma/gas combo >is still too hot. It behaves in an either/or manner: either too much power, or >no plasma! Maybe there is a way to overcome this problem. > >Since I had nothing to loose, I tried John's suggestion of lowering the value >of the capacitor in series with the magnetron. So far, this works, but I'm not >sure if the magnetron is being damaged in some way. You probably have not read my last reply to John. Changing the capacitor WILL likely damage the magnetron. But since this is a form of vacuum tube, it tends to fail more gracefully than solid-state devices. I would mainly expect you to get very much shorter life from the magnetron, perhaps tens of hours rather than hundreds or thousands. But this is just a guess. Remember that the plasmas also have negative resistance properties. A home microwave oven is a multimode cavity. Most commercial systems use single-mode resonant cavities when they want precise control. That little fan-blade like thing in your oven (which may be hidden under a plastic cover) is not a fan but a "stirrer" to deflect the microwaves from the waveguide and cause them to sweep the oven cavity in an attempt to get uniform heating of food. I would guess that the problems you are seeing are due to times when your plasma is in the full field of the oven. You might need to distribute smaller containers of water throughout the oven to make things more uniform. A possibility is to wrap the plasma chamber with Teflon tubing in which you have flowing water. Use a small diameter tubing; certainly no larger than 1/4 " OD. If you know how to make "waveguide beyond cutoff" openings into the cavity, you can go as large as 1/2" OD thick-wall tubing. Remember that the water has a high dielectric constant and thus the water filled waveguide has a much lower cutoff frequency than does air filled guide. If you do not understand what I am talking about here, email me. It is easy to hurt yourself by microwave leakage from the oven if you go drilling holes in the oven to run the tubing and do things wrong. Safety first! Barry ----------------- | ___ ________ | Dr. Barry L. Ornitz WA4VZQ | | / / | | Eastman Chemical Company | | / / | | ECC Research Laboratories, Engineering Research Div. | |< < K O D A K| | Process Instrumentation Research Laboratory | | \ \ | | P. O. Box 1972, Building 167B | |__\ \________| | Kingsport, TN 37662 (615/229-4904, FAX 615/229-4558) | | INTERNET: ornitz@kodak.com -----------------
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Newsgroups: sci.electronics Path: arc1-ca.pugleaf.net!sparky!uunet!psinntp!newsserver.pixel.kodak.com!kodak!ornitz From: ornitz@kodak.kodak.com (Barry x24904/ER/167B-TED) Subject: Re: Microwave Oven Plasma Etcher? (results) Message-ID: <1993Jan9.000930.19652@kodak.kodak.com> Followup-To: sci.electronics Sender: Barry L. Ornitz Organization: Eastman Chemical Company References: <15340.2b4a1345@ohstpy.mps.ohio-state.edu> <C0Is05.Fst@ve7frg.ampr.org> <15387.2b4d8179@ohstpy.mps.ohio-state.edu> Distribution: net Date: Sat, 9 Jan 93 00:09:30 GMT Lines: 49