Article View: sci.electronics
Article #7062Re: Current research in chip fabrication technology
From: Walter Wohlmuth
Date: Wed, 02 Sep 1992 15:57
Date: Wed, 02 Sep 1992 15:57
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In article <1992Aug31.200556.3498@aee.aee.com> gene@aee.aee.com (Gene Kochanowsky) writes: >hoff@fasic5.fnal.gov (Jim Hoff) writes: > >>In article <1992Aug20.004110.3357@unixg.ubc.ca>, sankey@unixg.ubc.ca (Todd Sankey) writes: >>|> >>|> I am trying to prepare a presentation on the current state of research >>|> in chip fabrication. I am requesting any sort of information from >>|> researchers/students/engineers/anyone in the know. > (lines deleted) >>I'm not really sure how to approach this. I guess, in short, I'll just ask >>what exactly is it you want to know? No offense, but this is like saying >>I'm presenting a paper on trees, send me everything you know about trees. >>It's just a little broad. If you ask specific question, or even post a >>questionaire, I'll be happy to respond, if it is in my area, but, heck, I >>could talk your ear off probably for several days running on >>"chip fabrication", and most of it would be of no interest to you whatsoever. > >>If you wish, please repost with a much more specific series of questions. > >> Jim Hoff >Jim, > > if you wished to do this that would be great. I have long had a great >interest in this area. However if this seems to be too much, then a brief overview >would also be appreciated. > >Gene Kochanowsky > >-- >------------------------------------------------------------------------------ >Gene Kochanowsky | "And remember .... >Associated Electronic Engineers, Inc. | The better you look ... >2864 Cercy Trace | I think the best way to get info on this topic is to respond to a list of different areas currently being researched. Below I present a partial list of the current areas of interest in semiconductor device/fab. tech. 1. Silicon, standard typically is DRAM size and minimum resolution -256 MBit DRAMs are currently being made with ~0.35 um resolution -1 GBit DRAMs expected in the next 5 years, ~0.2 um resolution -X-ray lithography should enable sub 0.1 um resolution, still need a collimated, high intensity source -phase shift mask tech. theoretically able to get 0.15 um res. 2. GaAs/AlGaAs & InGaAs/InAlAs/InP, high speed electronics -able to create devices in 1-100 GHz range -high radiation tolerance, i.e.: space & nuclear appl. -may be possible to integrate devices together with Si devices -fiber optics, communications 3. GaN, InN, AlN -potential for UV lasers and detectors, if realized will revolutionize graphics and imaging systems because solid state red, green and blue lasers will be available. -secure space to space communications, signals will be absorbed by ozone layer if it still exists -probs. in layer quality, not too severe 4. BN, SiC, diamond -superhard materials, high radiation tolerance, low co-eff. of friction, i.e. lubricant not needed. -appl. mainly in coatings, moving into semiconductors -research recently declassified -tremendous amount of appl. I hope this list helped you guys out. There is also a lot of research being done in multichip module, hybrid circuits of which I am mostly ignorant of at this moment. -------------------------------------------------------------------------- | Walter A. Wohlmuth walter@ee.ubc.ca | | Tri-University Meson Facility U of B.C., Canada | | Microelectronics Lab | --------------------------------------------------------------------------
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Newsgroups: sci.electronics Path: arc1-ca.pugleaf.net!sparky!uunet!gumby!destroyer!ubc-cs!fs1.ee.ubc.ca!walter From: walter@ee.ubc.ca (Walter Wohlmuth) Subject: Re: Current research in chip fabrication technology Message-ID: <1992Sep2.155758.17249@ee.ubc.ca> Organization: University of BC, Electrical Engineering References: <1992Aug20.004110.3357@unixg.ubc.ca> <2207@fnnews.fnal.gov> <1992Aug31.200556.3498@aee.aee.com> Date: Wed, 2 Sep 1992 15:57:58 GMT Lines: 76