Article View: sci.electronics
Article #19566Accelerometers on a chip
From: Richard W. Webb
Date: Mon, 01 Aug 1988 22:05
Date: Mon, 01 Aug 1988 22:05
36 lines
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2174 bytes
Hello Electronics experts,
I remember reading recently (in the last 3 months) about a design
of a small chip based accelerometer. The principle was that of a
variable capacitor, where the movable plate was actually a piece
of deposited metal that overhung another metal well.
^
| Acceleration causes bending of the metal overhang.
v
\__________ __________________________/
XXXXXXXXXX\___________________XXXXXXXXXX
XXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXX
The amount of acceleration is detected as a change in the capacitance
between the plates of the air gap as the metal overhang bends. The
degree of bending is slight, but the device can be made more sensitive
by making the length of the overhang larger. Fast response is not a
vital factor for our application either, as the sampling rates are
at most 100 Hz.
Some of my friends and myself are interested in producing small
scale seismographs to monitor earthquakes in the California area.
We currently have two (2) classical mechanical seismographs. But
now we are looking into the possibility of using single chip
accelerometers as the sensing elements in a network of seismographs.
Any references to actual sensors like these, articles about such
sensors, or any other related types of sensors would be greatly
appreciated.
Thanks,
--
Richard W. Webb ecvax!decwrl!borealis!\
ESL Inc. MS/302 sdcsvax!seismo!- ames!esl!rww
495 Java Drive (408) 738-2888 x5729 ucbcad!ucbvax!/ /
Sunnyvale, CA 94088 SMAIL: rww@esl.ESL.COM ihnp4!lll-lcc!
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<740@esl.UUCP>Path:
arc1-ca.pugleaf.net!utzoo!attcan!uunet!lll-winken!lll-tis!helios.ee.lbl.gov!pasteur!ucbvax!hplabs!cae780!leadsv!esl!rwwShow Full Headers
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Path: arc1-ca.pugleaf.net!utzoo!attcan!uunet!lll-winken!lll-tis!helios.ee.lbl.gov!pasteur!ucbvax!hplabs!cae780!leadsv!esl!rww From: rww@esl.UUCP (Richard W. Webb) Newsgroups: sci.electronics Subject: Accelerometers on a chip Keywords: accelerometers, chips, seismology Message-ID: <740@esl.UUCP> Date: 1 Aug 88 22:05:49 GMT Reply-To: rww@esl.UUCP (Richard W. Webb) Organization: ESL, Inc., Sunnyvale, CA. Lines: 35