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Article #166Re: Ohmic contacts to n-type silicon
From: sheldon haynie
Date: Thu, 10 Sep 1992 00:24
Date: Thu, 10 Sep 1992 00:24
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Use 0.5% As in Au in an evaporator, to get Ohmic contacts that will stick. You will need to have a donor (n+) concentration > 1e19 to get ohmic reliably with low resistance... BTW you will need to clean the native oxide off in HF either dilute (100:1) in H2O or fumes... email me for details... Sheldon Haynie | Unitrode IC Corp |( this space for rent) 7 Continental Blvd. | Merrimack, NH 03054 | FAX:603-424-3460 |voice:603-424-2410 (EST)| sdh@procad.uicc.com ******************************************************************************
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Newsgroups: sci.materials Path: arc1-ca.pugleaf.net!sparky!uunet!decwrl!deccrl!news.crl.dec.com!rdg.dec.com!decvax.dec.com!chillon!sdh From: sdh@uicc.com (sheldon haynie) Subject: Re: Ohmic contacts to n-type silicon Message-ID: <1992Sep10.002414.11771@uicc.com> Sender: news@uicc.com (USENET News System) Organization: Unitrode Integrated Circuits Corp., Merrimack, NH References: <1992Sep7.153215.8703@vax.oxford.ac.uk> <009604EF.CC3C5800@vms.csd.mu.edu> Date: Thu, 10 Sep 1992 00:24:14 GMT Lines: 14