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Article #174Re: Ohmic contacts to n-type silicon
From: Sze-Min Lin (MS G803560) TEL.715...
Date: Tue, 15 Sep 1992 09:51
Date: Tue, 15 Sep 1992 09:51
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5916rahmank@vms.csd.mu.edu writes: > In article <1992Sep7.153215.8703@vax.oxford.ac.uk>, atmdcc@vax.oxford.ac.uk > writes: > |>Does anyone know of a good method of making an ohmic contact to n-type > >silicon? > |> > |>What I'm looking for is a simple evaporation/ sputtering technique to > |>deposit a > |>metal or alloy down onto the silicon which avoids the unnecessary complication > |>of having to selectively dope a particular region. The metal-semiconductor > |>should not form a diode and the metal should adhere properly. > |> > |>I've looked at some literature and whilst there's plenty of theoretical info > |>about energy bands, Fermi levels, and so on, there's scant detail of what you > |>do in practice. > |>-- > |>................................................................................ > |> David Catling [Tel:+44 865 272927 Fax:+44 865 272923] > > We have used AuPd and Pt target to sputter contact pad on SnO2 and found > good results. I'm not sure if these metals produce non-ohmic contact > with Si. You might wanna look into Ben Streetman, and Heinz Henisch. > > -K. M. A. Rahman. i have read a paper they did the n-si contact just simply by 'attaching the whole silicon bottom side onto a copper plate with silver paint' to form the ohmic contact. the refernce is j. appl. phys. 68(11), 5902, 1990. hope this help. benjamin s. m. lin ------------ smlin@uz.nthu.edu.tw dept. materials sci & eng national tsing hua uni. hsin-chu, taiwan r.o.c. -------------
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Newsgroups: sci.materials Path: arc1-ca.pugleaf.net!sparky!uunet!zaphod.mps.ohio-state.edu!darwin.sura.net!spool.mu.edu!yale.edu!jvnc.net!news.edu.tw!news!Uz.nthu.edu.tw!smlin From: smlin@Uz.nthu.edu.tw (Sze-Min Lin (MS G803560) TEL.715131-3836) Subject: Re: Ohmic contacts to n-type silicon Message-ID: <1992Sep15.095141.5427%smlin@Uz.nthu.edu.tw> Organization: National Tsing Hua University (HsinChu) References: <009604EF.CC3C5800@vms.csd.mu.edu> Date: Tue, 15 Sep 1992 09:51:41 GMT Lines: 40