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Article #245

Re: Schottky contacts on p-silicon ?

#245
From: Ty Monson
Date: Fri, 06 Nov 1992 22:40
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In article <spe_pa.16.0@physik.uni-paderborn.de> spe_pa@physik.uni-paderborn.de (Peter Alteheld) writes:
 (stuff deleted)
>So, is there anybody out there who has experience in 
>preparing this kind of contacts ?
> 			
 I don't know the "best" way to prepare these contacts, but I got
 Schottky contacts on p-type Si by sputtering Titanium on the Si,
 followed by a layer of Aluminum.

 The Si must be clean, of course. After chemical cleaning, I introduced
 the specimen to the ion beam immediately prior to metal deposition
 in order to sputter away any remaining contamination. As I said, I
 don't know if this is the best method, but I did get schottky diodes,
 and I was able to do DLTS measurements with these contacts.
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Path: arc1-ca.pugleaf.net!sparky!uunet!ogicse!sequent!news.orst.edu!hobo.ECE.ORST.EDU!monson
From: monson@hobo.ECE.ORST.EDU (Ty Monson)
Newsgroups: sci.materials
Subject: Re: Schottky contacts on p-silicon ?
Message-ID: <BxBGBw.522@news.orst.edu>
Date: 6 Nov 92 22:40:36 GMT
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References: <spe_pa.16.0@physik.uni-paderborn.de>
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