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Article #245Re: Schottky contacts on p-silicon ?
From: Ty Monson
Date: Fri, 06 Nov 1992 22:40
Date: Fri, 06 Nov 1992 22:40
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In article <spe_pa.16.0@physik.uni-paderborn.de> spe_pa@physik.uni-paderborn.de (Peter Alteheld) writes: (stuff deleted) >So, is there anybody out there who has experience in >preparing this kind of contacts ? > I don't know the "best" way to prepare these contacts, but I got Schottky contacts on p-type Si by sputtering Titanium on the Si, followed by a layer of Aluminum. The Si must be clean, of course. After chemical cleaning, I introduced the specimen to the ion beam immediately prior to metal deposition in order to sputter away any remaining contamination. As I said, I don't know if this is the best method, but I did get schottky diodes, and I was able to do DLTS measurements with these contacts.
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Path: arc1-ca.pugleaf.net!sparky!uunet!ogicse!sequent!news.orst.edu!hobo.ECE.ORST.EDU!monson From: monson@hobo.ECE.ORST.EDU (Ty Monson) Newsgroups: sci.materials Subject: Re: Schottky contacts on p-silicon ? Message-ID: <BxBGBw.522@news.orst.edu> Date: 6 Nov 92 22:40:36 GMT Article-I.D.: news.BxBGBw.522 References: <spe_pa.16.0@physik.uni-paderborn.de> Sender: usenet@news.orst.edu Organization: ECE Dept.,OSU,Corvallis Lines: 14 Nntp-Posting-Host: hobo.ece.orst.edu