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Article #319Selective Etchant for AlgaAs...
From: Helen Peng
Date: Thu, 19 Nov 1992 05:18
Date: Thu, 19 Nov 1992 05:18
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HI, Is there anyone who knows the selective etchant to remove Al.3Ga.7As layer but not GaAs Layer? Thanks for your attention/help.
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<1992Nov19.051801.15395@nuscc.nus.sg>Path:
arc1-ca.pugleaf.net!sparky!uunet!zaphod.mps.ohio-state.edu!sample.eng.ohio-state.edu!purdue!haven.umd.edu!darwin.sura.net!jvnc.net!nuscc!elepcjShow Full Headers
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Newsgroups: sci.materials Path: arc1-ca.pugleaf.net!sparky!uunet!zaphod.mps.ohio-state.edu!sample.eng.ohio-state.edu!purdue!haven.umd.edu!darwin.sura.net!jvnc.net!nuscc!elepcj From: elepcj@nuscc.nus.sg (Helen Peng) Subject: Selective Etchant for AlgaAs... Message-ID: <1992Nov19.051801.15395@nuscc.nus.sg> Organization: National University of Singapore X-Newsreader: Tin 1.1 PL4 Date: Thu, 19 Nov 1992 05:18:01 GMT Lines: 6