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Article #365Re: Need to make a glass surface rough ...
From: khartman
Date: Sat, 02 Jan 1993 03:31
Date: Sat, 02 Jan 1993 03:31
45 lines
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2321 bytes
In article <4rlrf7c@lynx.unm.edu>, swami@chtm.eece.unm.edu (Swami srinivasan) writes: > > I need to make a 50 microns x 1000 microns section of glass surface > ROUGH. I have a mask with the required dimensions. Most etchants are > "smooth", and I suspect the common HF based etchants are, too. Are there > any wet chemical etchants that can be used? > I also have access to RIE > and RIBE systems, but cannot think of any obvious ways to use them to > make a rough surface - so far, we have always wanted a smooth etch! > We have a full-fledged cleanroom with the usual equipment, so we should > be able to try out most suggestions, including uncertain leads. > > We are trying to make a low reflectivity strip on a mirror. This > will be used in an external cavity configuration. Initially we thought > of making crossed diffraction gratings, but there will still be a zero > order reflection.. and grating fabrication is a little involved. Hence > we are trying to find ways to make the surface diffusive using some > form of etching, with the dimensions decided by a mask. > > Any suggestions will be helpful. Thanks! > > swami You might try using gaseous HF instead of aqueous HF. I recall reading somewhere that aqueous HF will leave a "clearer" (smoother?) etch, while the gas was used to frost light bulbs. This might provide a coarser surface. Form the gaseous HF by mixing Sodium Fluoride and concentrated Sulfuric Acid in a lead dish (keep this in a fume hood). > ======================================================================= > swaminathan srinivasan > center for high tech materials > eece,university of new mexico, > albuquerque, nm 87131, usa swami@chtm.eece.unm.edu > ======================================================================== > Ken
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Path: arc1-ca.pugleaf.net!sparky!uunet!zaphod.mps.ohio-state.edu!pacific.mps.ohio-state.edu!linac!mp.cs.niu.edu!fnnews.fnal.gov!fnal.fnal.gov!khartman From: khartman@fnalnb.fnal.gov Newsgroups: sci.materials Subject: Re: Need to make a glass surface rough ... Date: 1 Jan 93 21:31:11 -0600 Organization: Fermi National Accelerator Lab Lines: 46 Message-ID: <1993Jan1.213111.1@fnalnb.fnal.gov> References: <4rlrf7c@lynx.unm.edu> NNTP-Posting-Host: fnalnb.fnal.gov