Chemical thinning of GaAs

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Article #435

#435

From: gambit
Date: Tue, 12 Jan 1993 20:52

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I am currently trying to improve TEM sample preparation for gallium
arsenide specimens.  My present method of production is by dimpling
the GaAs to about 50 microns, and then using chemical thinning to
produce an electron transparent region.  However, I have not been getting
very useful results after the chemical thinning.  This is either a result
of the thinning process itself (I am using sulfuric acid and hydrogen 
peroxide) or the cleaning process afterwards.  The process is time-consuming
as well.  I would like to be able to improve it as much as possible, but
am having difficulty finding any references on this technique.

Does anyone know of any reference materials on chemical thinning of
semiconductors?  Please E-mail me if you do.  Thanks in advance!

------------------------

Benjamin W. Lagow
Grad Res Asst, Dept. of Materials Science and Engineering
University of Illinois at Urbana-Champaign

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From: gambit@uxa.cso.uiuc.edu ()
Subject: Chemical thinning of GaAs
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Organization: University of Illinois at Urbana
Date: Tue, 12 Jan 1993 20:52:55 GMT
Keywords: TEM, sample preparation
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