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Article #482

Hall measurents on conductive thin film

#482
From: Juan Pedro Espinós
Date: Fri, 18 Aug 2000 00:00
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I am a Spaniard  working in the field of Transparent Conductive Thin
Films
(in particular, Al doped ZnO thin films) for a year. My project
requires me to  prepare by assisted CVD methods (mainly plasma assisted
and ion beam assisted) and characterize these thin films.

Can anyone kindly suggest some books or literature available on
electrical characterization of conductive thin films (thickness lower
than 500 nm) by Hall measurements by the van der Pauw method?. In
particular, I need to know as many relevant experimental details as
possible  (sample dimensions, how to make the electrode contacts, values
of the current and/or magnetic field applied, technical description of
the instruments used (power supply unit, voltimeter, amperimeter, Hall
sensor,  electromagnet, electrical noise filters, ...)  in order to
"make" my own experimental set up.
In these kind of "conductors", the lower resistivity, according with
literatue, is around 5.10-4 Ohms.cm, the higher carrier concentration
between 10-19 10-20 cm-3 and their mobility is around 25 cm-2/Vs.

Any suggestions will be wellcome.

Thank you in advance,



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<!doctype html public "-//w3c//dtd html 4.0 transitional//en">
<html>
I am a Spaniard&nbsp; working in the field of Transparent Conductive Thin
Films
<br>(in particular, Al doped ZnO thin films) for a year. My project&nbsp;
requires me to&nbsp; prepare by assisted CVD methods (mainly plasma assisted
and ion beam assisted) and characterize these thin films.
<p>Can anyone kindly suggest some books or literature available on
<br>electrical characterization of conductive thin films (thickness lower
than 500 nm) by Hall measurements by the van der Pauw method?. In particular,
I need to know as many relevant experimental details as possible&nbsp;
(sample dimensions, how to make the electrode contacts, values of the current
and/or magnetic field applied, technical description of the instruments
used (power supply unit, voltimeter, amperimeter, Hall sensor,&nbsp; electromagnet,
electrical noise filters, ...)&nbsp; in order to "make" my own experimental
set up.
<br>In these kind of "conductors", the lower resistivity, according with
literatue, is around 5.10<font size=-2>-4</font> Ohms.cm, the higher carrier
concentration between 10<font size=-2>-19 </font>10<font size=-2>-20 </font>cm<font size=-2>-3</font>
and their mobility is around 25 cm<font size=-2>-2</font>/Vs.
<p>Any suggestions will be wellcome.
<p>Thank you in advance,
<br>&nbsp;
<br>&nbsp;</html>

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From: Juan Pedro Espinós <jpedro@cica.es>
Subject: Hall measurents on conductive thin film
Date: 2000/08/18
Message-ID: <399D54E6.5626D9C4@cica.es>
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