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Article #990

Re: Thin bond oxide roughness measurement with optical profiler.

#990
From: Calum Dickinson
Date: Sun, 18 Apr 2004 17:01
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On 17 Apr 2004, Karel Cote wrote:

> Since the oxide is very thin (500 Ang)... is it really the bond oxide
> roughness I'm measuring or I am seeing the silicon roughness due to
> the transparency of the film??? If it would have been a very thick
> oxide I would have been able to discriminate between the two set of
> fringes... But it's so thin!!!!
> 
> I don't know if it makes any difference but i'm using the PSI filters
> when I make these measurements.. (orange 565-645 nm or red light
> 640-660nm).
> 
> 

Trying to view 50nm with a wavelength of an order of magnitude larger will
not give the resolution that you require. The use of an electron
microscope would be very useful, like was suggested by the other reply.
The microscope that i use , JEM 2011 TEM, the electron wavelength would be
0.00251nm which will give you a better resolution of the rough surface.
It's a possibility to use the SEM.

To use the anaolgy of my supervisor, Dr Wuzong Zhou, if you put a pebble
in a river then it is hard to see the ripples. put the same pebble in a
stream, then the ripples are easier to see. This is due to the river,
light, having bigger waves,wavelength, than a stream, electron,. I like
the analogy.

Calum Dickinson

************************
Calum Dickinson BSc Hons
Electron Microscopy Department
School of Chemistry
University of St Andrews
Scotland, UK
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From: Calum Dickinson <cd29@st-andrews.ac.uk>
Newsgroups: sci.nanotech,can.vlsi,sci.engr.micromachining
Subject: Re: Thin bond oxide roughness measurement with optical profiler.
Date: 18 Apr 2004 17:01:24 GMT
Organization: University of St Andrews
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