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Article #990Re: Thin bond oxide roughness measurement with optical profiler.
From: Calum Dickinson
Date: Sun, 18 Apr 2004 17:01
Date: Sun, 18 Apr 2004 17:01
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On 17 Apr 2004, Karel Cote wrote: > Since the oxide is very thin (500 Ang)... is it really the bond oxide > roughness I'm measuring or I am seeing the silicon roughness due to > the transparency of the film??? If it would have been a very thick > oxide I would have been able to discriminate between the two set of > fringes... But it's so thin!!!! > > I don't know if it makes any difference but i'm using the PSI filters > when I make these measurements.. (orange 565-645 nm or red light > 640-660nm). > > Trying to view 50nm with a wavelength of an order of magnitude larger will not give the resolution that you require. The use of an electron microscope would be very useful, like was suggested by the other reply. The microscope that i use , JEM 2011 TEM, the electron wavelength would be 0.00251nm which will give you a better resolution of the rough surface. It's a possibility to use the SEM. To use the anaolgy of my supervisor, Dr Wuzong Zhou, if you put a pebble in a river then it is hard to see the ripples. put the same pebble in a stream, then the ripples are easier to see. This is due to the river, light, having bigger waves,wavelength, than a stream, electron,. I like the analogy. Calum Dickinson ************************ Calum Dickinson BSc Hons Electron Microscopy Department School of Chemistry University of St Andrews Scotland, UK
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X-Google-Language: ENGLISH,ASCII-7-bit X-Google-Thread: f70d0,a79baccec2433037 X-Google-Attributes: gidf70d0,public X-Google-Thread: 10396f,a79baccec2433037 X-Google-Attributes: gid10396f,public X-Google-Thread: 10c5ca,a79baccec2433037 X-Google-Attributes: gid10c5ca,public X-Google-ArrivalTime: 2004-04-18 10:20:19 PST Path: arc1-ca.pugleaf.net!archiver1.google.com!news1.google.com!news.glorb.com!cyclone1.gnilink.net!gnilink.net!wn52feed!worldnet.att.net!129.250.169.16!pln-e!spln!dex!extra.newsguy.com!newsp.newsguy.com!enews4 From: Calum Dickinson <cd29@st-andrews.ac.uk> Newsgroups: sci.nanotech,can.vlsi,sci.engr.micromachining Subject: Re: Thin bond oxide roughness measurement with optical profiler. Date: 18 Apr 2004 17:01:24 GMT Organization: University of St Andrews Lines: 40 Approved: JamesL@Lugoj.com Message-ID: <c5uc940fn0@enews4.newsguy.com> References: <c5q11p029ta@enews3.newsguy.com> NNTP-Posting-Host: p-762.newsdawg.com X-psw: PyModerator 0.3