looking for e-beam resist

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Article #1314

#1314

From: Ronald van der Pol
Date: Fri, 09 Feb 1990 10:26

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I am reposting this message because I didn't get any reactions last
year. Please ask your local physics or electrical engineering
department if they can give any information. I would be very
grateful!

	Does anyone know a source of M-SNR? This is a novel kind
of Silicon-based Negative e-beam Resist, which is reported to be
more sensitive to UV light.
	M-SNR is supposed to be commercially available, but
we have been unable to locate any source.
	If you can help us, please reply by email.

Any information about M-SNR would be welcome.

Thanks in advance,
--
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		Ronald van der Pol  <rvdp@cs.vu.nl>
These are the days of miracle and wonder, this is a long distance call....

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Path: arc1-ca.pugleaf.net!utzoo!utgpu!jarvis.csri.toronto.edu!cs.utexas.edu!uunet!mcsun!hp4nl!star.cs.vu.nl!rvdp
From: rvdp@cs.vu.nl (Ronald van der Pol)
Newsgroups: comp.lsi
Subject: looking for e-beam resist
Message-ID: <5347@star.cs.vu.nl>
Date: 9 Feb 90 10:26:12 GMT
Sender: news@cs.vu.nl
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