Schottky contacts on p-silicon ?

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2 total messages Started by Peter Alteheld Fri, 06 Nov 1992 15:11

#244

Author: Peter Alteheld
Date: Fri, 06 Nov 1992 15:11

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Some time ago, there was a discussion in this 
newsgroup about ohmic contacts on silicon.
Now I would to know the best ways to prepare 
a Schottky contact on p-type silicon (especially for 
the use deep level tansient spectroscopy).
So, is there anybody out there who has experience in 
preparing this kind of contacts ?

Re: Schottky contacts on p-silicon ?

#245

Author: Ty Monson
Date: Fri, 06 Nov 1992 22:40

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In article <spe_pa.16.0@physik.uni-paderborn.de> spe_pa@physik.uni-paderborn.de (Peter Alteheld) writes:
 (stuff deleted)
>So, is there anybody out there who has experience in 
>preparing this kind of contacts ?
> 			
 I don't know the "best" way to prepare these contacts, but I got
 Schottky contacts on p-type Si by sputtering Titanium on the Si,
 followed by a layer of Aluminum.

 The Si must be clean, of course. After chemical cleaning, I introduced
 the specimen to the ion beam immediately prior to metal deposition
 in order to sputter away any remaining contamination. As I said, I
 don't know if this is the best method, but I did get schottky diodes,
 and I was able to do DLTS measurements with these contacts.

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